| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic casting method capable of equalizing resistivity in longitudinal direction of ingot, even if it is a case where a dopant which evaporates easily is used, when an n-type silicon ingot is electromagnetically cast. <P>SOLUTION: In the electromagnetic casting method for continuously casting an n-type silicon ingot wherein a silicon raw material 11 and a dopant are charged in a bottomless cooling crucible 7 which is arranged in a chamber 1 and has conductivity, the silicon raw material 11 and the dopant are melted by the electromagnetic induction heating from an induction coil 8 which surrounds the crucible 7, and the molten silicon 12 is solidified while pulling down this molten silicon 12 from the crucible 7, the electromagnetic casting is performed in maintaining the inside of the chamber 1 at the pressure higher than normal pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
