| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electromagnetic casting method capable of controlling molten silicon from being contaminated by metal impurities, and oxygen concentration and carbon concentration in molten silicon from being increased, which are caused by metal impurities or superfluous oxygen and carbon contained in an atmospheric gas, when a silicon ingot is electromagnetically cast. <P>SOLUTION: In the electromagnetic casting method for continuously casting a silicon ingot 3 wherein a silicon raw material 11 is charged in a bottomless cooling crucible 7 which is arranged in a chamber 1 and has conductivity, the silicon raw material 11 is melted by the electromagnetic induction heating from an induction coil 8 which surrounds the crucible 7, and the molten silicon 12 is solidified while pulling down the molten silicon 12 from the crucible 7, the electromagnetic casting is performed in maintaining the inside of chamber 1 at a pressure lower than normal pressure. <P>COPYRIGHT: (C)2012,JPO&INPIT |
