| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing device which places a processed substrate to be processed in a certain empty slot of a cassette. <P>SOLUTION: A substrate processing device takes out a substrate to be processed W from a cassette C having a plurality of slots S to process the substrate. The substrate processing device comprises: a substrate processing part 45 for processing the substrate to be processed W; transportation parts 32 and 42 for transporting the substrate to be processed W from the cassette C to the substrate processing part 45 and for transporting the substrate to be processed W processed by the substrate processing part 45 from the substrate processing part 45 to the cassette C; a slot confirmation part 11 for confirming if the slot S is empty; a control part 50 which reads out the slot S specified for every substrate to be processed W which is housed after being processed by the substrate processing part 45 before being placed in the cassette C after being processed by the substrate processing part 45, and which causes the slot confirmation part 11 to confirm whether the slot S is empty. <P>COPYRIGHT: (C)2012,JPO&INPIT |
