发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
摘要 A semiconductor device according to an embodiment, includes a catalytic metal film, a graphene film, a contact plug, and an adjustment film. The catalytic metal film is formed above a substrate. The graphene film is formed on the catalytic metal film. The contact plug is connected to the graphene film. The adjustment film is formed in a region other than a region connected to the contact plug of a surface of the graphene film to adjust a Dirac point position in a same direction as the region connected to the contact plug with respect to a Fermi level.
申请公布号 US2012068160(A1) 申请公布日期 2012.03.22
申请号 US201113075591 申请日期 2011.03.30
申请人 YAMAZAKI YUICHI;WADA MAKOTO;SAKAI TADASHI;KABUSHIKI KAISHA TOSHIBA 发明人 YAMAZAKI YUICHI;WADA MAKOTO;SAKAI TADASHI
分类号 H01L29/12;B82Y99/00;H01L21/20 主分类号 H01L29/12
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