| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent the damage of an adhered body, and to suppress the deformation of an adhesive sheet to be pasted, when the adhesive sheet having a recessed portion is pasted. <P>SOLUTION: A sheet pasting roller 86 comprises a roller body 90 having a shaft-shape, and a first elastic member 91 disposed so as to project out on an outer peripheral side of the roller body 90. The first elastic member 91 abuts on an area corresponding to except for a recessed portion C bottom surface on a base material sheet BS side of an adhesive sheet S, and is provided so as to press the adhesive sheet S on a semiconductor wafer W. In the first elastic member 91, when the adhesive sheet S is pasted, a part for pressing the adhesive sheet S on the semiconductor wafer W is provided so as to deform to be the same height as a surface of the roller body 90. <P>COPYRIGHT: (C)2012,JPO&INPIT |
