PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND METHODS FOR THE MANUFACTURE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide piezoelectric elements and the like having improved reliability.

SOLUTION: A piezoelectric element according to the present invention includes: a vibration plate 10 having a recess 14 in a first surface 16; a first electrode 20 formed in the recess 14; a piezoelectric layer 30 formed on the vibration plate 10 and the first electrode 20; and a second electrode 40 formed on the piezoelectric layer 30. In the piezoelectric element, an upper surface 21 of the first electrode 20 forms a continuous flat surface together with the first surface 16.

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