| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of treating a gas, capable of making the life of a decomposer longer and of efficiently treating a gas comprising a fluorine-containing compound. <P>SOLUTION: The method of treating a gas comprises causing a carrier gas containing oxygen, and a gas containing a fluorine-containing compound as an object to be treated to flow through a reaction tube 3 filled with a decomposer comprising γ-AL<SB POS="POST">2</SB>O<SB POS="POST">3</SB>as an oxide catalyst and CaO as a solid alkali while heating the gas mixture, whereby the life of the decomposer can be made longer and the gas containing a fluorine-containing compound can efficiently be treated. <P>COPYRIGHT: (C)2012,JPO&INPIT |
