发明名称 ROTARY JOINT AND SPUTTERING SYSTEM
摘要 <P>PROBLEM TO BE SOLVED: To provide a rotary joint which can be effectively cooled while reducing the device in size. <P>SOLUTION: The rotary joint 200 includes a housing 204 having an insertion hole and an introducing opening 215 for introducing fluid from the outside, a shaft body unit 201 inserted into the insertion hole of the housing in order to rotate relatively with respect to a rotary shaft together with the housing, and a switching member 208 which is formed within the shaft body unit along an axial direction and is provided in the middle of first and second shaft body unit introducing paths to communicate with the introducing opening and to switch a flow rate of the fluid. The switching member includes a first hole 209 and a second hole 210 which is smaller than the first hole in diameter and is further smaller than the first and second shaft body unit introducing paths in diameter. The flow rates of the fluid flowing through the first and second shaft body unit introducing paths can be varied by the switching member. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012057755(A) 申请公布日期 2012.03.22
申请号 JP20100203241 申请日期 2010.09.10
申请人 CANON ANELVA CORP 发明人 YASUMATSU YASUSHI
分类号 F16L27/093;C23C14/34 主分类号 F16L27/093
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