摘要 |
<P>PROBLEM TO BE SOLVED: To provide a gas barrier film which does not deteriorate a gas barrier property, and has transparent and advanced gas barrier properties even in high temperature treatment or a post process. <P>SOLUTION: The gas barrier film includes: an aluminum oxide layer in which an O/AL ratio of a film surface layer measured by the XPS method has a range of 1.7-2.3 and a film density measured by the GIXR method has a range of 2.5-2.8 g/cm<SP POS="POST">3</SP>on one side or both sides of a polymer film substrate; and further an organic compound layer containing a silane compound on the aluminum oxide layer laminated in order. <P>COPYRIGHT: (C)2012,JPO&INPIT |