SYSTEMS, METHODS AND APPARATUS THAT EMPLOY STATISTICAL ANALYSIS OF STRUCTURAL TEST INFORMATION TO IDENTIFY YIELD LOSS MECHANISMS
摘要
A method for statistically analyzing structural test information to identify at least one yield loss mechanism includes executing a plurality of instructions on a computer system. The executed instructions cause the computer system to perform the steps of: 1) identifying potential root causes for items of structural test information obtained for a plurality of semiconductor devices; 2) statistically analyzing the items of structural test information to identify at least one non-random device failure signature within the items of structural test information; and 3) identifying from the potential root causes a probable root cause for at least a first of the at least one non-random device failure signature.
申请公布号
WO2012036666(A1)
申请公布日期
2012.03.22
申请号
WO2010US48656
申请日期
2010.09.13
申请人
VERIGY (SINGAPORE) PTE. LTD.;ORBON, JACOB, J.;VOLKERINK, ERIK, H.