发明名称 POSITIVE PHOTOSENSITIVE RESIN COMPOSITION, METHOD OF CREATING RESIST PATTERN, AND ELECTRONIC COMPONENT
摘要 <p>The disclosed positive photosensitive resin composition contains an alkali-soluble resin having a phenolic hydroxyl group, a compound that generates acids by light, a thermal cross-linking agent, and a silane compound having at least one functional group selected from an epoxy group and a sulfide group.</p>
申请公布号 WO2012036000(A1) 申请公布日期 2012.03.22
申请号 WO2011JP70055 申请日期 2011.09.02
申请人 HITACHI CHEMICAL COMPANY, LTD.;TANIMOTO AKITOSHI;NOBE SHIGERU;KASUYA KEI;MATSUTANI HIROSHI;UENO TAKUMI;AOKI YU;TAHARA SHINGO 发明人 TANIMOTO AKITOSHI;NOBE SHIGERU;KASUYA KEI;MATSUTANI HIROSHI;UENO TAKUMI;AOKI YU;TAHARA SHINGO
分类号 G03F7/075;G03F7/004;G03F7/023;H01L21/027 主分类号 G03F7/075
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