发明名称 |
Ultrasonic measuring method, electronic component manufacturing method, and semiconductor package |
摘要 |
The waveform signals of ultrasonic waves reflected by a plurality of interfaces in a measurement object are received, the waveform signal of a reflected wave on a reference interface inside the measurement object is detected based on the amplitudes of the received waveform signals, and evaluation is made on the bonded condition of an interface to be measured based on the waveform signal of the reflected wave on the reference interface. |
申请公布号 |
US8138601(B2) |
申请公布日期 |
2012.03.20 |
申请号 |
US20080338157 |
申请日期 |
2008.12.18 |
申请人 |
PANASONIC CORPORATION |
发明人 |
KOMATSU SHINSUKE;UEDA YOICHIRO |
分类号 |
H01L23/06 |
主分类号 |
H01L23/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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