СПОСОБ ОСАЖДЕНИЯ ЛЕГИРОВАННЫХ ПЛЕНОК ПОЛИКРИСТАЛЛИЧЕСКОГО КРЕМНИЯ,申请号SU19894637428-传众专利搜索

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发明名称	СПОСОБ ОСАЖДЕНИЯ ЛЕГИРОВАННЫХ ПЛЕНОК ПОЛИКРИСТАЛЛИЧЕСКОГО КРЕМНИЯ
摘要
申请公布号	RU1588202(C)	申请公布日期	2012.03.20
申请号	SU19894637428	申请日期	1989.01.13
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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