СПОСОБ ФОРМИРОВАНИЯ ПЛЕНОК НИТРИДА КРЕМНИЯ,申请号SU19894746763-传众专利搜索

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发明名称	СПОСОБ ФОРМИРОВАНИЯ ПЛЕНОК НИТРИДА КРЕМНИЯ
摘要
申请公布号	RU1715138(C)	申请公布日期	2012.03.20
申请号	SU19894746763	申请日期	1989.10.09
申请人	Научно-производственное объединение "Интеграл"	发明人	Турцевич А.С.;Красницкий В.Я.;Козлов А.Л.;Кастрицкий Л.В.;Макаревич И.И.
分类号	H01L21/318	主分类号	H01L21/318
代理机构		代理人
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