CHEMICAL LIQUID PIPING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a chemical liquid piping device for atomizing an air bubble which is dissolved in chemical liquid and has such a small size that the air bubble can not be removed with a filter and the like.

SOLUTION: The chemical liquid piping device for a coating apparatus or an injection apparatus which applies or injects chemical liquid on a substrate comprises: a flow path of the chemical liquid having multiple different cross sections; an ultrasonic head which is provided on a flow path outer wall halfway through the flow path and pulverizes air bubbles; an ultrasonic echo board which is provided at a position facing the ultrasonic head on the flow path outer wall halfway through the flow path and is for reflecting vibration of the ultrasonic head; temperature adjustment mechanisms which are provided near the ultrasonic head and the ultrasonic echo board and are for adjusting temperature of the chemical liquid; and a volume adjustment block which is inserted halfway through the flow path and atomizes the air bubbles. The chemical liquid piping device atomizes the air bubbles in the chemical liquid.

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