发明名称 ELECTRODE BODY HAVING CIRCUIT PATTERN AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To form the circuit pattern of an extremely fine conductive film without carrying out any etching process. <P>SOLUTION: An electrode 40 is brought into contact with or to a prescribed distance to a metal oxide film 23 on a substrate 21 having a laminated film formed by laminating a conductive film 22 and the metal oxide film 23 in this order on the surface thereof. In this state, voltage is applied between the electrode 40 and the conductive film 22, and while the distance is kept unchanged, the relative position of the electrode 40 and the metal oxide film 23 is changed, and the specific resistance of the metal oxide film 23 is locally changed so that a circuit pattern can be formed. The voltage to be applied causes the generation of an electric field which is necessary and sufficient for moving oxygen contained in the metal oxide film 23 as an oxide ion. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012053646(A) 申请公布日期 2012.03.15
申请号 JP20100195296 申请日期 2010.09.01
申请人 OIKE IND CO LTD;TOTTORI UNIV 发明人 HINOKI TOSHIO;KINOSHITA KENTARO;KISHIDA SATORU;HIROMI MITSUNORI;OKUTANI TAKUMI;TANAKA HAYATO
分类号 G06F3/041;H01B5/14;H01B13/00;H01L21/027 主分类号 G06F3/041
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