| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ozone generation means, capable of making compact the sizes of an ozone generator and an ozone treatment system including the same and achieving energy saving by dispensing with the injection of additive gas and a device therefor. <P>SOLUTION: The method for operating an ozone generator includes using only a raw material gas having oxygen purity of 99.8% or more, and continuing the operation with a discharge power density needed for discharge being set to 0.1 W/cm<SP POS="POST">2</SP>or less to generate ozone having a predetermined concentration. <P>COPYRIGHT: (C)2012,JPO&INPIT |
