| 摘要 |
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11 , provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6 a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11 , and first and second detection electrodes 6 b, 6 c, formed on both sides of the driving electrode 6 a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6 a. With a width W 0 of the driving electrode 6 a, a width W 1 of the first detection electrode 6 b, a width W 2 of the second detection electrode 6 c and with W=W 0+ W 1+ W 2 , the condition of 0.5<(W 0 /W)<1 is to be met. |
