发明名称 METHOD OF MANUFACTURING ELECTRONIC DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To form strong joining between substrates. <P>SOLUTION: A method of manufacturing an electronic apparatus includes: a step of adhering a first substrate and a second substrate via a metallic paste containing metal particles and organic solvent; a step of forming an aggregate of the metal particles by removing the organic solvent from the metallic paste; a step of reducing surfaces of the metal particles constituting the aggregate using reductive gas; and a step of joining the first substrate and the second substrate using the aggregate by pressing the first substrate and the second substrate after a step of reducing the surfaces of the metal particles constituting the aggregate. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012054358(A) 申请公布日期 2012.03.15
申请号 JP20100195004 申请日期 2010.08.31
申请人 FUJITSU LTD 发明人 MIZUKOSHI MASATAKA;ABE HIDEYUKI
分类号 H01L21/52 主分类号 H01L21/52
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