发明名称 FIXING MECHANISM, WORKPIECE FIXING METHOD AND WORKPIECE FIXATION RELEASING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a fixing mechanism for excellently fixing a flat-plate type workpiece in an upright posture, a workpiece fixing method by the fixing mechanism, and a workpiece fixation releasing method. <P>SOLUTION: A press frame 72 is designed annularly, and presses the outer edge portion of a workpiece 3. Plural urging members 73 are formed of elastic members such as springs or the like, and connected to corresponding corners of four corners of the press frame 72. Each of plural movable clamp portions 61 (61a to 61c) advances or retreats in the direction approaching to or separating from the press frame 72. A fixing clamp portion 62 is fixed around the press frame 72. Each of the plural movable clamp portions 61 and the fixing clamp portion 62 is provided along the press frame 72. Accordingly, the outer edge portion of the workpiece 3 is excellently pinched by the plural movable clamp portions 61, the fixing clamp portion 62 and the press frame 72. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012054279(A) 申请公布日期 2012.03.15
申请号 JP20100193462 申请日期 2010.08.31
申请人 MITSUBOSHI DIAMOND INDUSTRIAL CO LTD 发明人 OKAJIMA YASUTOMO;IKEDA KENICHIRO
分类号 H01L21/683;B23Q3/06;B28D7/04 主分类号 H01L21/683
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