发明名称 SUPER TRENCH MOSFET INCLUDING EMBEDDED SOURCE ELECTRODE AND METHOD OF MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a new type MOSFET having a lower on resistance. <P>SOLUTION: A transistor comprises an arrangement of annular trench, a source metal film 224 and a gate metal film 524. In the arrangement of annular trench, each trench is separated from an adjoining trench by an annular mesa. The gate metal film 524 has a plurality of gate metal legs 524A, 524B, 524C, 524D extending radially outward from a central region toward the periphery of a die. The source metal film 224 has a plurality of parts located between the gate metal legs 524A, 524B, 524C, 524D. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012054592(A) 申请公布日期 2012.03.15
申请号 JP20110240200 申请日期 2011.11.01
申请人 SILICONIX INC 发明人 PATTANAYAK DEVA N;BAI YUMING;TERRILL KYLE;YUE CHRISTINA;XU ROBERT;LUI KAM HONG;CHEN KUO-IN;SHI SHARON
分类号 H01L29/78;H01L21/336;H01L29/06;H01L29/40;H01L29/417;H01L29/423 主分类号 H01L29/78
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