发明名称 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
摘要 According to one embodiment, a semiconductor memory device includes a stacked body, a contact, a semiconductor member, a charge storage layer, and a penetration member. The stacked body includes an electrode film stacked alternately with an insulating film. A configuration of an end portion of the stacked body is a stairstep configuration having a step provided every electrode film. The contact is connected to the electrode film from above the end portion. The semiconductor member is provided in a portion of the stacked body other than the end portion to pierce the stacked body in a stacking direction. The charge storage layer is provided between the electrode film and the semiconductor member. The penetration member pierces the end portion in the stacking direction. The penetration member does not include the same kind of material as the charge storage layer.
申请公布号 US2012061743(A1) 申请公布日期 2012.03.15
申请号 US201113004229 申请日期 2011.01.11
申请人 WATANABE NOBUTAKA;HIGASHI KAZUYUKI;SUDO GAKU;KABUSHIKI KAISHA TOSHIBA 发明人 WATANABE NOBUTAKA;HIGASHI KAZUYUKI;SUDO GAKU
分类号 H01L29/792;H01L21/336 主分类号 H01L29/792
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