| 摘要 |
This disclosure provides systems, methods and apparatus for forming an air gap in an EMS device without using a sacrificial layer in the air gap. In some implementations, a support structure is formed on the substrate, and a sacrificial substrate is provided on the support structure. A liner material is deposited on the substrate, the support structure, and the sacrificial substrate, for instance, via an atomic layer deposition (ALD) process. The sacrificial substrate can be removed, and a top layer material can be deposited on the exposed areas of the support structure and the liner material. The liner material defines an air gap between the substrate and the top layer material.
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