发明名称 |
Optical device and method of making |
摘要 |
An optical device and method is disclosed for forming the optical device within the wide-bandgap semiconductor substrate. The optical device is formed by directing a thermal energy beam onto a selected portion of the wide-bandgap semiconductor substrate for changing an optical property of the selected portion to form the optical device in the wide-bandgap semiconductor substrate. The thermal energy beam defines the optical and physical properties of the optical device. The optical device may take the form of an electro-optical device with the addition of electrodes located on the wide-bandgap semiconductor substrate in proximity to the optical device for changing the optical property of the optical device upon a change of a voltage applied to the optional electrodes. The invention is also incorporated into a method of using the optical device for remotely sensing temperature, pressure and/or chemical composition. |
申请公布号 |
US2012064655(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201113134091 |
申请日期 |
2011.05.27 |
申请人 |
QUICK NATHANIEL R.;KAR ARAVINDA;UNIVERSITY OF CENTRAL FLORIDA |
发明人 |
QUICK NATHANIEL R.;KAR ARAVINDA |
分类号 |
H01L21/02;H01L35/34 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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