发明名称 ACTUATOR AND OPTICAL SCANNING DEVICE USING ACTUATOR
摘要 An actuator which tilts and drives an object to be driven around an axis of rotation includes: a pair of supporting beams arranged to support the object to be driven from both sides thereof in a direction parallel to the axis of rotation; a pair of movable beams arranged to sandwich the object to be driven and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a drive source arranged to apply bending vibration to the movable frames; and a pair of connection parts arranged to connect the movable frames and end portions of the supporting beams by a multiple-beam structure, convert the bending vibration into torsional vibration, and transmit the torsional vibration to the supporting beams.
申请公布号 US2012062970(A1) 申请公布日期 2012.03.15
申请号 US201013319380 申请日期 2010.04.21
申请人 MITSUMI ELECTRIC CO., LTD. 发明人 YAMADA TSUKASA;EHARA MASATO
分类号 G02B26/10;H01L41/053 主分类号 G02B26/10
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