发明名称 |
ACTUATOR AND OPTICAL SCANNING DEVICE USING ACTUATOR |
摘要 |
An actuator which tilts and drives an object to be driven around an axis of rotation includes: a pair of supporting beams arranged to support the object to be driven from both sides thereof in a direction parallel to the axis of rotation; a pair of movable beams arranged to sandwich the object to be driven and the pair of supporting beams from both sides in a direction perpendicular to the axis of rotation; a drive source arranged to apply bending vibration to the movable frames; and a pair of connection parts arranged to connect the movable frames and end portions of the supporting beams by a multiple-beam structure, convert the bending vibration into torsional vibration, and transmit the torsional vibration to the supporting beams.
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申请公布号 |
US2012062970(A1) |
申请公布日期 |
2012.03.15 |
申请号 |
US201013319380 |
申请日期 |
2010.04.21 |
申请人 |
MITSUMI ELECTRIC CO., LTD. |
发明人 |
YAMADA TSUKASA;EHARA MASATO |
分类号 |
G02B26/10;H01L41/053 |
主分类号 |
G02B26/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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