发明名称 ANTIREFLECTIVE LAYER FOR BACKSIDE ILLUMINATED IMAGE SENSOR AND METHOD OF MANUFACTURING SAME
摘要 PURPOSE: An antireflective layer for a backlight image sensor and a manufacturing method thereof are provided to multiply permeability of red, green, blue optical wavelengths. CONSTITUTION: A substrate(210) comprises a front side(212) and a back side(214). A pixel array(220) is formed on the front of the substrate. The pixel array detects the brightness of incident light(225) which is irradiated toward the back side of the substrate. The pixel array comprises pixels corresponding to specific optical wavelengths. An MLI(Multilayer Interconnect) structure(230) is formed on the front of the substrate. The MLI structure comprises insulating layers(232, 233, 234) in which conductive layers(235, 236) are formed.
申请公布号 KR20120024361(A) 申请公布日期 2012.03.14
申请号 KR20110017320 申请日期 2011.02.25
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 HUANG CHIH HUI;TSAI CHENG YUAN;TU YEUR LUEN;TSAI CHIA SHIUNG;YAUNG DUN NIAN;LIU JEN CHENG
分类号 H01L27/146 主分类号 H01L27/146
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