发明名称 Device and method for separating and transporting substrates
摘要 <p>The device (1) has a vertical belt conveyor (9) with conveyor belts (11, 11'') in an adjacent region arranged co-planar to each other. One of the conveyor belts is connected to the other conveyor belt under continuation of a vertical profile of the latter conveyor belt. Length of regions of the former conveyor belt arranged coplanar to the latter belt along vertical conveyance direction corresponds to length of a substrate (3). The former belt in connection to the coplanar region includes conveying legs (23, 24) in which one leg in connection to the coplanar region runs in an inclined manner. An independent claim is also included for a method for isolating, switching and transporting disk-shaped substrates.</p>
申请公布号 EP2428987(A1) 申请公布日期 2012.03.14
申请号 EP20110007220 申请日期 2011.09.06
申请人 RENA GMBH 发明人 RENN, SIEGFRIED;DECHANT-WAGNER, ROLAND
分类号 H01L21/67;B28D5/00;B65H3/12;H01L21/677 主分类号 H01L21/67
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