发明名称 |
LIGHT IRRADIATION APPARATUS |
摘要 |
<p>A light irradiation device comprises: a stage (ST) mounting a substrate on which a linear photo-curable resin (S) is formed; and a light irradiation unit (3) including a plurality of optical elements (LED) arranged along one direction. The light irradiation unit (3) generates a linear light beam (LB) extending in the one direction by overlapping the light beams emitted from the optical elements (LED) and irradiates the linear photo-curable resin (S) formed on the substrate with the linear light beam (LB) while allowing the linear light beam (LB) to face the linear photo-curable resin (S) along the one direction. The light irradiation device further comprises a light-absorbing member (18) formed on the surface of the stage (ST).</p> |
申请公布号 |
KR20120024348(A) |
申请公布日期 |
2012.03.14 |
申请号 |
KR20107029579 |
申请日期 |
2010.07.20 |
申请人 |
ULVAC, INC. |
发明人 |
ENDOU SHIGERU;HATANO NORIHIKO;KADOWAKI TETSUJI |
分类号 |
G02F1/13;G02F1/1339;G03F9/00;H01L21/027 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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