发明名称 LIGHT IRRADIATION APPARATUS
摘要 <p>A light irradiation device comprises: a stage (ST) mounting a substrate on which a linear photo-curable resin (S) is formed; and a light irradiation unit (3) including a plurality of optical elements (LED) arranged along one direction. The light irradiation unit (3) generates a linear light beam (LB) extending in the one direction by overlapping the light beams emitted from the optical elements (LED) and irradiates the linear photo-curable resin (S) formed on the substrate with the linear light beam (LB) while allowing the linear light beam (LB) to face the linear photo-curable resin (S) along the one direction. The light irradiation device further comprises a light-absorbing member (18) formed on the surface of the stage (ST).</p>
申请公布号 KR20120024348(A) 申请公布日期 2012.03.14
申请号 KR20107029579 申请日期 2010.07.20
申请人 ULVAC, INC. 发明人 ENDOU SHIGERU;HATANO NORIHIKO;KADOWAKI TETSUJI
分类号 G02F1/13;G02F1/1339;G03F9/00;H01L21/027 主分类号 G02F1/13
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