发明名称 Photoresists comprising multi-amide component
摘要 <p>New photoresist compositions are provided that comprise a component that comprises two or more amide groups. Preferred photoresists of the invention may comprise a resin with photoacid-labile groups; a photoacid generator compound; and a multi-amide component that can function to decrease undesired photogenrated-acid diffusion out of unexposed regions of a photoresist coating layer</p>
申请公布号 EP2428842(A1) 申请公布日期 2012.03.14
申请号 EP20110181122 申请日期 2011.09.13
申请人 ROHM AND HAAS ELECTRONIC MATERIALS LLC 发明人 PROKOPOWICZ, GREGORY P.;POHLERS, GERHARD;LIU, CONG;WU, CHUNYI;XU, CHENG-BAI;OH, JOON SEOK
分类号 G03F7/038;G03F7/039 主分类号 G03F7/038
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