TITANIA-DOPED QUARTZ GLASS AND MAKING METHOD

摘要

PURPOSE: A titania doped quartz glass and a manufacturing method thereof are provided to reduce transmittance distribution of absorption edge wavelength per 5mm thickness. CONSTITUTION: A manufacturing method of titania doped quartz glass comprises the following steps: venting silicon feed gas, titanium feed gas, combustible gas, and flammable gas from front end part of a burner(1); oxidizing hydrolysis or flame hydrolysis the silicon feed gas and titanium feed gas using the combustible gas and flammable gas; obtaining synthetic silica-titania particle; depositing the synthetic silica-titania particle on target which moves backwards at certain speed by rotating the particle; and manufacturing ingot of titania doped quartz glass by melt vitrification. A distance between the front-end part of the burner and front-end part of the ingot(2) is 250mm or greater. An Angle between growth axis of the ingot and nozzle axis of central tube for spraying feed gas is 126degree or greater.