Film forming apparatus and jetting nozzle

摘要

A film forming apparatus (1) includes an aerosol generating section (10) which generates an aerosol (7); a jetting nozzle (30) having an internal passage (31) formed therein and through which the aerosol flows, the internal passage having one end serving as a supply port (32) of the aerosol and having other end serving as a jetting port (33) of the aerosol; a narrowed channel (34B) which is provided in the internal passage and which has a channel area narrower than a channel area on an upstream of the narrowed channel; and a collision portion (36A) which is provided in the internal passage on a downstream of the narrowed channel, and against which a flow of the aerosol passed through the narrowed channel collides. Since the aggregated particles are crushed and supplied from the jetting nozzle in the form of fine particles, a thin and uniform film can be formed on the process-objective material (B).