发明名称 |
Method of producing mold having uneven structure |
摘要 |
A method of producing a mold having an uneven structure and a mold for an optical element are provided. The method includes forming on a nickel substrate a mixed film using nickel and a material which phase separates from nickel simultaneously, the mixed film including a plurality of cylinders including nickel as a component thereof and a matrix region including the material which phase separates from nickel as a component thereof and surrounding the plurality of cylinders; and removing the matrix portion from the mixed film by etching to give a mold including nickel or a nickel alloy. The uneven structure is disposed in plurality on the substrate, and a pitch of the uneven structure is within a range of 30 nm or more and 500 nm or less and a depth of the uneven structure is within a range of 100 nm or more. |
申请公布号 |
US8133538(B2) |
申请公布日期 |
2012.03.13 |
申请号 |
US20070686512 |
申请日期 |
2007.03.15 |
申请人 |
HORIE RYOKO;MATSUO YASUHIRO;YASUI NOBUHIRO;DEN TORU;CANON KABUSHIKI KAISHA |
发明人 |
HORIE RYOKO;MATSUO YASUHIRO;YASUI NOBUHIRO;DEN TORU |
分类号 |
B05D5/00 |
主分类号 |
B05D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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