CHEMICAL SUPPLYING APPARATUS AND CHEMICAL SUPPLYING METHOD USING THE SAME

摘要

PURPOSE: A chemical supplying apparatus and a chemical supplying method using the same are provided to control the chemical concentration of a plurality of chemical production supply unit through one concentration level by supplying a chemical which is produced from each chemical production supply unit. CONSTITUTION: A tank(10) mixes the predetermined amount of a solute and a solvent and generates chemical. A pump(120) pumps the chemical of tank according to the control of a controller. A circulation line(130) circulates the chemical into the tank. A first valve(AV1) is opened and closed by the first vale drive signal of the controller. A second valve(AV2) is opened and closed by the second valve drive signal(Svd2) of the controller.