| 摘要 |
PURPOSE: A high precision pressure control apparatus is provided to precisely control internal pressure of a pressure container by easily arranging a vacuum state and a pressurized state of the internal pressure. CONSTITUTION: A connection pipe(20) is comprised of an intake/exhaust line(21), first and second branch lines(22,23), and a third branch line(25). The intake/exhaust line supplies air to a pump(10) or discharges air emitted from the pump. The first and the second branch lines are connected to the pump. The third branch line is connected to a fine pressure controller(40). A switching valve(30) converts a flow path. The fine pressure controller accurately controls internal pressure of a pressure container. A pressure sensor(50) detects pressure inside of a pipe. A display part(60) outputs information from the pressure sensor. |
