| 摘要 |
<p>FIELD: physics. ^ SUBSTANCE: sol-gel solution of a boric or phosphoric composition is fed in batches onto a disc cup-shaped head rotating at approximately 60 rpm. Through centrifugal force, the head breaks up the sol-gel solution of the boric or phosphoric composition into fine drops which are charged when the head is sputtered with high electric potential. Oppositely signed potential is applied across a semiconductor plate. Directed deposition of the fine drops onto the surface of the plate takes place owing to the formed electrostatic field. ^ EFFECT: possibility of conformal and uniform deposition of a film coating based on a boric or phosphoric composition, even on a textured surface, using both aqueous and alcoholic sol-gel solutions. ^ 1 ex, 1 dwg</p> |
