DISPLAY SUBSTRATEAND METHOD OF MANUFACTURING THE SAME

摘要

PURPOSE: A display substrate and a manufacturing method thereof are provided to have a reliable and stable thin film transistor. CONSTITUTION: A gate wire includes a gate line and a gate electrode(26). The gate wire is formed on an insulating substrate. A semiconductor pattern(42) is formed on the gate wire. The semiconductor pattern comprises a metal oxide nitride semiconductor. A data wire crosses the gate wire on the semiconductor pattern. The carrier concentration of the semiconductor pattern is 1.E+16cm^2 to 1.E+19cm^2.