| 摘要 |
<P>PROBLEM TO BE SOLVED: To form a protrusion in the order of nanometer that can be used as a quantum dot or a quantum wire on the surface of a substrate and to form a protrusion in the order of nanometer configured of an element different from that constituting the substrate. <P>SOLUTION: A protrusion-forming material containing a second element is supplied to the surface of a substrate 11 containing a first element, and the surface of the substrate 11 is irradiated with a laser beam so as to form a plurality of protrusions 14 essentially comprising the second element or a plurality of protrusions 14 containing the first element and the second element on the surface of the substrate 11 at intervals 21 (peak-to-peak distance) of the wavelength of the laser beam or shorter. The first element may be an element different from the second element. Preferably, the laser beam is a nano-second pulsed laser beam, and the radiation conditions of the laser beam are preferably 2.0×10<SP POS="POST">3</SP>to 4.0×10<SP POS="POST">3</SP>mJ/m<SP POS="POST">2</SP>/pulse, 2 to 20 Hz, and the number of pulses of 200 to 20,000. <P>COPYRIGHT: (C)2012,JPO&INPIT |
