INSPECTION APPARATUS FOR PLATE-LIKE OBJECT TO BE INSPECTED

摘要

PROBLEM TO BE SOLVED: To correctly inspect an object to be inspected without exchanging a panel holder and regardless of whether the object to be inspected includes a polarizer.

SOLUTION: An inspection apparatus for a plate-like object to be inspected includes: a first base having a first opening; four second bases cooperatively forming a second opening opposite to the first opening; and at least one elevation device for elevating at least one second base that corresponds to the elevation device. The elevation device is disposed between the first base having the first opening vertically penetrated and the four long second bases disposed above the first base in a frame shape so as to cooperatively form the second opening opposite to the first opening and supports the corresponding second base vertically movably on the first base.

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