| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an internal flaw detection method for exciting ultrasonic waves to a sample without contact and without damaging the sample, and detecting the ultrasonic waves from a flaw inside the sample without contact, with high sensitivity, and without being affected by the surface of the sample; and a device for the same. <P>SOLUTION: Ultrasonic waves are emitted from a ultrasonic transmission part toward a sample to detect the ultrasonic waves reflected from the sample as an interference signal by an image-formation type common optical path interferometer. An ultrasonic signal is obtained from the interference signal to detect a flaw inside the sample from the ultrasonic signal. <P>COPYRIGHT: (C)2012,JPO&INPIT |
