| 摘要 |
PURPOSE: A transfer arm chuck and a wafer transfer apparatus including the same are provided to prevent faults due to defects by changing the material and design of a transfer arm chuck transferring an etched wafer to a processing section. CONSTITUTION: A vacuum hole(142) is formed in a central part of a chuck body(141). A contact unit is formed in a peripheral part of the chuck body and is touched with a wafer. The contact unit is made of an elastic body. A vacuum pod(143) is included in the contact unit. The contact unit occupies 35%-45% of an upper side of a transfer arm chuck.
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