| 摘要 |
The purpose of the present invention is to provide: an image forming device capable of extracting data relating to distortion within a scanning area for a charged particle beam; and a computer program. In order to achieve said purpose, provided are: an image forming device that integrates image data obtained by a charged particle beam device and calculates, from a plurality of images with different scanning directions for the charged particle beam device, a first data relating to the amount of variation in feature quantities which vary according to the beam irradiation time of a charged particle beam, a second data relating to the amount of variation in feature quantities before and after the beam scanning direction changes, and/or a third data relating to position displacement of a pattern on the images before and after the beam scanning direction changes; and a computer program that makes a calculation device execute the above processing (see Fig. 3.). |
