LAMINATED STRUCTURE AND METHOD FOR PRODUCING SAME

摘要

Provided are a laminated structure in which impurities are favorably inhibited from mixing into the indium target thereof, and a method for producing the laminated structure. The laminated structure includes: a backing plate; an impurity diffusion preventing layer formed on the backing plate and consisting of a thin film made of at least one type of metal selected from Fe, W, Ta, Te, Nb, Mo, S, and Si; and an indium target formed on the impurity diffusion preventing layer.