| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a tray unit capable of improving alignment accuracy. <P>SOLUTION: The present invention relates to a tray unit in which a plurality of semiconductor devices as inspection targets can be mounted. The tray unit has: a bottom plate member forming a bottom part; and a semiconductor device mounting tray which is placed on the bottom plate member and divided into a plurality of parts in a horizontal direction each for mounting and holding the plurality of semiconductor devices. Each of the semiconductor devices is freely removably mounted in a semiconductor device inspection apparatus which collectively tests electrical characteristics of the semiconductor device, while turning a terminal that the semiconductor device includes toward an upper surface side. <P>COPYRIGHT: (C)2012,JPO&INPIT |
