| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a slit nozzle apparatus by which a shape can be easily specified so as to obtain an even thin film-like jet of coating liquid, and the even thin film-like jet of the coating liquid can be obtained by easily following changes even when viscosity or fluidity of the coating liquid is changed. <P>SOLUTION: In the slit nozzle apparatus, a nozzle block includes a slit opening for finally jetting the thin film-like jet of the coating liquid and a linear coating liquid final storage chamber, an orifice plate includes a plurality of orifice openings, an intermediate block includes a linear coating liquid intermediate storage chamber, a plurality of orifice openings, and a linear coating liquid receiving storage chamber, and an inlet block includes a coating liquid inlet port, and they are overlapped serially. <P>COPYRIGHT: (C)2012,JPO&INPIT |
