发明名称 FINE PARTICLE MEASURING INSTRUMENT AND OPTICAL AXIS CORRECTION METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a fine particle measurement instrument which is capable of performing measurement in high accuracy by automatically correcting deviation of an optical axis. <P>SOLUTION: A fine particle measurement instrument includes: light collecting means which collects irradiated light radiated to a sample flow where fine particles pass, and traveling straight without being scattered by fine particles and scattered light scattered by fine particles, on a light receiving element divided into a plurality of areas; position control means which adjusts relative positions of members constituting an optical path; and control means which detects collection spot positions of the irradiated light and the scattered light on the basis of signal intensities in respective areas of the light receiving element and controls the position control means so that the collection spot positions of the irradiated light and the scattered light coincide with each other. <P>COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP2012047464(A) 申请公布日期 2012.03.08
申请号 JP20100186961 申请日期 2010.08.24
申请人 SONY CORP 发明人 DOWAKI MASARU;IMANISHI SHINGO;HASHIMOTO GAKUJI;SUZUKI SHUNPEI
分类号 G01N15/14 主分类号 G01N15/14
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