摘要 |
<P>PROBLEM TO BE SOLVED: To provide a thermal type flowmeter capable of improving measurement accuracy of a flow rate of a fluid while miniaturizing the flowmeter. <P>SOLUTION: The thermal type flowmeter 10 including a sensor passage S to which a heat wire for measuring a flow rate of a fluid to be measured is laid and a first bypass passage B1 and a second bypass passage B2 from the sensor passage S further includes: a measurement chip 60, a sensor substrate 50; and a passage block 40 for branching the first bypass passage B1 and the second bypass passage B2 form the sensor passage S. The sensor substrate 50 is vertically arranged in a space formed by a body 20 for storing the passage block 40 and the sensor substrate 50 and a cover 30 for covering an aperture of the body 20, a gateway of the fluid to be measured is arranged on the same surface as the body 20, and a rib 70 projected into the first bypass passage B1 is formed on the body 20. <P>COPYRIGHT: (C)2012,JPO&INPIT |