发明名称 Method of forming staggered thin film transistor
摘要 A staggered thin film transistor and a method of forming the staggered thin film transistor are provided. The thin film transistor includes an annealed layer stack including an oxide containing layer, a copper alloy layer deposited on the conductive oxide layer, a copper containing oxide layer, and a copper containing layer.
申请公布号 EP2426720(A1) 申请公布日期 2012.03.07
申请号 EP20100175294 申请日期 2010.09.03
申请人 APPLIED MATERIALS, INC. 发明人 PIERALISI, FABIO
分类号 H01L29/66;H01L23/532;H01L29/45;H01L29/49;H01L29/786 主分类号 H01L29/66
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