| 发明名称 |
SYSTEM FOR MEASURING CARRIER LIFETIME OF SEMICONDUCTOR WAFERS |
| 摘要 |
<p>A contactless rf technique for measurement of the carrier lifetime from the photoconductivity induced in silicon wafers by a flash of infrared light. The carrier lifetime is inferred from the photoconductivity decay.</p> |
| 申请公布号 |
CA1225435(A) |
申请公布日期 |
1987.08.11 |
| 申请号 |
CA19830436423 |
申请日期 |
1983.09.09 |
| 申请人 |
EXXON RESEARCH AND ENGINEERING COMPANY |
发明人 |
TIEDJE, J. THOMAS |
| 分类号 |
G01R31/26;G01R31/265;H01L21/66;(IPC1-7):G01R31/26 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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| 地址 |
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