发明名称 PELLET BONDER
摘要 PURPOSE:To make it possible to ensure the detection of erroneous attraction of a pellet in a simple constitution, by providing a sensor, which detects the presence or absence of the pellet, in a pellet-positioning mechanism. CONSTITUTION:A sensor, which detects the presence or absence of a pellet 2, is arranged in a pellet positioning mechanism. A hole 7 is provided in a main body 3 of the positioning mechanism so as to face the pellet 2. When the pellet 2 is not present in a recess part 5, light, which is emitted from a light emitting device 8, reaches a photomultiplier 9 through the hole 7. Sensors are not arranged at two places between the pellet group and the positioning mechanism 3 and between the positioning mechanism 3 and a body to be bonded 18. But the sensor is provided only one place, and the presence or absence of the pellet 2 is judged. Thus the erroneous attraction of the pellet can be detected positively by the simple mechanism.
申请公布号 JPS63179542(A) 申请公布日期 1988.07.23
申请号 JP19870009910 申请日期 1987.01.21
申请人 HITACHI LTD;HITACHI HOKKAI SEMICONDUCTOR LTD 发明人 SHIBATA HIDEKAZU
分类号 H01L21/52;H01L21/677;H01L21/68 主分类号 H01L21/52
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