| 摘要 |
PURPOSE: An organic-inorganic composite is provide to have high elasticity, self-release ability, and relatively low viscosity, thereby manufacturing a stamp for nanoimprint with micro patterns having excellent physical properties. CONSTITUTION: An organic-inorganic composite comprises backbone material, release material, and a photo initiator. The backbone material consists of inorganic material. At least one of the release material and the photoinitiator consists of organic material. The inorganic material of the backbone material is a compound containing at least one selected from a group consisting of Si, In, Zn, Al and Ti. A stamp for nanoimprint(S1) comprises a micro unevenness part(20a) formed of the organic-inorganic composite, and a support plate(200) supporting the micro unevenness part.
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